AMReL is equipped with the following: Heading link
- Atomic Layer Deposition reactor
- Rapid Thermal Processing/Chemical Vapor Deposition System
- Copper Catalytic Reactor
- 3-zone Quartz Oxidation/Nitridation/Oxynitridation Furnace, Lindberg/Blue
- Single-zone Quartz Oxidation/Nitridation/Oxynitridation Furnace, Varian
- 200 amu Mass Spectrometers, Stanford Research Systems (Two)
- Spectral Ellipsometer, J.A. Woollam Co. M-44
- UV Ozone Generation-cum-Monitoring System
- Fourier Transform Infrared Spectrometer, Nicolet
- Goniometer, Rame’-Hart NRL CA Goniometer (M#100-0, S#2067).
- Pyrometer, Research Inc.
- Nanospectrometer, Nanometrics
- Wafer Surface Viewing Optical Microscope
- Ultrasonic Wafer Cleaning System, Branson
- Atomic Absorption Spectrometer, Perkin Elmer
- UV Ozone Generation-cum-Monitoring System
- UV Ozone Generation-cum-Monitoring System